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원통형 매크로기공을 갖는 다공질 실리콘과 다이어프램의 제작

민남기, 이치우, 하동식, 정우식

Fabrication of Cylindrical Macroporous Silicon and Diaphragms

Nam Ki Min, Chi Woo Lee, Dong Sik Ha, Woo Sik Jeong
J Electr Electron Mater 1998;11(8):620-627.
Published online: August 1, 1998
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Fabrication of Cylindrical Macroporous Silicon and Diaphragms
J Electr Electron Mater. 1998;11(8):620-627.   Published online August 1, 1998
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Fabrication of Cylindrical Macroporous Silicon and Diaphragms
J Electr Electron Mater. 1998;11(8):620-627.   Published online August 1, 1998
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