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Inductively Coupled Plasma 에 의한 fluorocarbon 가스 플라즈마의 실리카 표현 반응 연구

박상호, 신장욱, 정명영, 최태구, 권광호

The Study of Silica Surface Reaction with Fluorocarbon Plasma Using Inductively Coupled Plasma

Sang Ho Park, Jang Uk Shin, Myung Young Jung, Tae Goo Choy, Wang Ho Kwon
J Electr Electron Mater 1998;11(6):472-476.
Published online: June 1, 1998
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The Study of Silica Surface Reaction with Fluorocarbon Plasma Using Inductively Coupled Plasma
J Electr Electron Mater. 1998;11(6):472-476.   Published online June 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Study of Silica Surface Reaction with Fluorocarbon Plasma Using Inductively Coupled Plasma
J Electr Electron Mater. 1998;11(6):472-476.   Published online June 1, 1998
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