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진공증착증합법에 의해 제조된 폴리이미드 박막의 플라즈마 처리에 의한 표면의 변화

김형권, 이붕주, 김종택, 김영봉, 이덕출

The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment

Hyeong Gweon Kim, Boong Joo Lee, Jong Taek Kim, Yong Bong Kim, Duck Chool Lee
J Electr Electron Mater 1998;11(5):340-346.
Published online: May 1, 1998
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The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment
J Electr Electron Mater. 1998;11(5):340-346.   Published online May 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Surface Effect of Polyimide Thin Film by Vapor Deposition Polymerization Method With Plasma Treatment
J Electr Electron Mater. 1998;11(5):340-346.   Published online May 1, 1998
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