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Al ( Cu 1 % ) 막의 플라즈마 시각후 부식 억제를 위한 SF6 처리시 fluorine passivation 효과

김창일, 권광호, 백규하, 윤용선, 김상기, 남기수

The Effects of Fluorine Passivation on SF6 Treatment for Anti-corrosion affer Al ( Cu 1% ) Plasma Etching

Chang Il Kim, Kwang Ho Kwon, Kyu Ha Baek, Yong Sun Yun, Sang Gi Kim, Kee Soo Nam
J Electr Electron Mater 1998;11(3):203-207.
Published online: March 1, 1998
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The Effects of Fluorine Passivation on SF6 Treatment for Anti-corrosion affer Al ( Cu 1% ) Plasma Etching
J Electr Electron Mater. 1998;11(3):203-207.   Published online March 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Effects of Fluorine Passivation on SF6 Treatment for Anti-corrosion affer Al ( Cu 1% ) Plasma Etching
J Electr Electron Mater. 1998;11(3):203-207.   Published online March 1, 1998
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