A Study on Photoresist Stripping Using High Density Oxygen Plasma

Hyoung Sup Jung; Jong Geun Lee; Se Geun Park; Jae Kyun Yang

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고밀도 산소 플라즈마를 이용한 감광제 제거공정에 관한 연구

정형섭, 이종근, 박세근, 양재군

A Study on Photoresist Stripping Using High Density Oxygen Plasma

Hyoung Sup Jung, Jong Geun Lee, Se Geun Park, Jae Kyun Yang

J Electr Electron Mater 1998;11(2):95-100.
Published online: February 1, 1998

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A Study on Photoresist Stripping Using High Density Oxygen Plasma

J Electr Electron Mater. 1998;11(2):95-100. Published online February 1, 1998

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on Photoresist Stripping Using High Density Oxygen Plasma

J Electr Electron Mater. 1998;11(2):95-100. Published online February 1, 1998

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고밀도 산소 플라즈마를 이용한 감광제 제거공정에 관한 연구

A Study on Photoresist Stripping Using High Density Oxygen Plasma

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