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질화막 성장의 하지의존성에 따른 적층캐패시터의 이상산화에 관한 연구

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A Study on the Abnormal Oxidation of Stacked Capacitor due to Underlayer Dependent Nitride Deposition

Yang Hee Joung
J Electr Electron Mater 1998;11(1):33-40.
Published online: January 1, 1998
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A Study on the Abnormal Oxidation of Stacked Capacitor due to Underlayer Dependent Nitride Deposition
J Electr Electron Mater. 1998;11(1):33-40.   Published online January 1, 1998
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study on the Abnormal Oxidation of Stacked Capacitor due to Underlayer Dependent Nitride Deposition
J Electr Electron Mater. 1998;11(1):33-40.   Published online January 1, 1998
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