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Cu - Ni 박막 스트레인 게이지를 이용한 다이어프램식 압력 센서 -Ⅱ : 압력 센서의 설계 , 제작 및 특성

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Diaphragm - Type Pressure Sensor with Cu - Ni Thin Film Strain Gauges -Ⅱ Design , Fabrication , and Characteristics of a Pressure Sensor

Nam Ki Min, Jae Hyung Chun, Chan Won Park
J Electr Electron Mater 1997;10(10):1022-1028.
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Diaphragm - Type Pressure Sensor with Cu - Ni Thin Film Strain Gauges -Ⅱ Design , Fabrication , and Characteristics of a Pressure Sensor
J Electr Electron Mater. 1997;10(10):1022-1028.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Include:
Diaphragm - Type Pressure Sensor with Cu - Ni Thin Film Strain Gauges -Ⅱ Design , Fabrication , and Characteristics of a Pressure Sensor
J Electr Electron Mater. 1997;10(10):1022-1028.
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