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J Electr Electron Mater : Journal of Electrical and Electronic Materials

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촉매법을 적용한 오존 저감형 플라즈마 기기

전신영, 김동준, 김종엽, 권진구, 전용민, 도계령, 이성의

A Study on the Ozone Reduction of Plasma Devices by Catalyst Method

Sin Young Jeon, Dong Jun Kim, Jong Yeop Kim, Jin Gu Gwon, Young Min Jeon, Gye Ryung Do, Seong Eui Lee
J Electr Electron Mater 2021;34(1):56-62.
Published online: January 1, 2021
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In this study, we created a DBD plasma device and a MnO2 catalyst mesh filter for evaluating ozone reduction of devices via the catalyst method. The DBD plasma device was manufactured by applying MnO2 paste to soda lime glass via the screen-printing method. The MnO2 catalyst mesh filter was manufactured by mixing MnO2 powder with binder with a 10% difference in concentration from 10% to 50% and then applying it using the dip-coating method. Finally, we sintered a MnO2 catalyst mesh filter in an electric furnace. We evaluated the characteristics of ozone generation according to the MnO2 gas flow of DBD plasma devices, the opening ratio, and ozone reduction performance of the MnO2 catalyst filters. Ozone reduction performance was approximately 20.4% at MnO210 wt%, 37.8% at MnO2 30 wt% and 50% at MnO2 50 wt%.

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A Study on the Ozone Reduction of Plasma Devices by Catalyst Method
J Electr Electron Mater. 2021;34(1):56-62.   Published online January 1, 2021
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Ozone Reduction of Plasma Devices by Catalyst Method
J Electr Electron Mater. 2021;34(1):56-62.   Published online January 1, 2021
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