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플라즈마 파라메타 측정용 고속 Langmuir 프로브 구동회로 실현 및 적용

신중홍, 고태언, 김두환, 박정후

A Study on Fast Langmuir Probe Driving Circuit for Measurement of Plasma Parameter and Its Application

Jung Hong Shin, Tai Eun Ko, Doo Hwan Kim, Chung Hoo Park
J Electr Electron Mater 1996;9(5):506-511.
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A Study on Fast Langmuir Probe Driving Circuit for Measurement of Plasma Parameter and Its Application
J Electr Electron Mater. 1996;9(5):506-511.
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A Study on Fast Langmuir Probe Driving Circuit for Measurement of Plasma Parameter and Its Application
J Electr Electron Mater. 1996;9(5):506-511.
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