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마이크로파 플라즈마 화학기상성장법에 의해 ( 110 ) 면으로 배향된 다이아몬드막의 합성

박재철, 박상현

Synthesis of ( 110 ) Oriented Diamond Films by Microwave Plasma Enhanced Chemical Vapor Deposition

Jae Chul Park, Sang Hyun Park
J Electr Electron Mater 1996;9(3):270-276.
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Synthesis of ( 110 ) Oriented Diamond Films by Microwave Plasma Enhanced Chemical Vapor Deposition
J Electr Electron Mater. 1996;9(3):270-276.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Synthesis of ( 110 ) Oriented Diamond Films by Microwave Plasma Enhanced Chemical Vapor Deposition
J Electr Electron Mater. 1996;9(3):270-276.
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