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RF magnetron sputtering 법으로 ZnO 박막 제조시 기판온도에 따른 c축 배향성에 관한 연구

이종덕, 송준태

A Study on c - axis Preferred Orientation at a Various Substrate Temperature of ZnO Thin Film Deposited by RF Magnetron Sputtering

Jong Duk Lee, Joon Tae Song
J Korean Inst Electr Electron Mater Eng 1996;9(2):196-203.
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A Study on c - axis Preferred Orientation at a Various Substrate Temperature of ZnO Thin Film Deposited by RF Magnetron Sputtering
J Korean Inst Electr Electron Mater Eng. 1996;9(2):196-203.
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Include:
A Study on c - axis Preferred Orientation at a Various Substrate Temperature of ZnO Thin Film Deposited by RF Magnetron Sputtering
J Korean Inst Electr Electron Mater Eng. 1996;9(2):196-203.
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