The Sr0.7Bi2.3Nb2O9(SBN) thin films are deposited on Pt electrode(Pt/Ti/SiO2/Si) using RF sputtering method at various deposition temperature. The deposition temperature of optimum was 300℃. SBN thin films were annealed at 500∼700℃ using furnace and RTA, respectively. The surface roughness showed about 2.42 nm in annealing temperature(600℃) of furnace. The capacitance density of SBN thin films were increased with the increase of annealing temperature. The maximum capacitance density of 0.7 ㎌/㎠was obtained by annealing temperature(700℃). The frequency dependence of dielectric loss showed about 0.03 in frequency ranges of 1∼1,000 kHz.
