B-doped Si nanoparticles were synthesized by using inductive coupled plasma and speciallydesigned double tube reactor, and their microstructures were investigated. 0∼10 sccm of B2H6 gas wasinjected during the synthesis of Si nanoparticles from SiH4 gas. Highly crystalline Si nanoparticles weresynthesized, and their crystallinity did not change with increase of B2H6 flow rates. From SEMmeasurement, their particle sizes were approximately 30 nm regardless of B2H6 flow rates. From SIMSanalysis, almost saturation of B in Si nanoparticles was detected only when 1 sccm of B2H6 was injected. When B2H6 flow rate exceeded 5 sccm, higher concentration of B than solubility limit was detected evenif any secondary phase was not detected in XRD or HR-TEM results. Due to their high electronicconductivity, those heavily B-doped Si nanoparticles can be a potential candidate for an active material inLi-ion battery anode.
