Thin films of cubic Na0.6WO3, which is one of the sodium tungsten bronze, were fabricated byrf sputtering for the electrode applications in integrated sensors and actuators. A single-phase cubicNa0.6WO3 sputtering target of power type was prepared by conventional solid-state reaction. Thin filmswere deposited from the powder target, and the as-deposited films were amorphous, thus they annealedby tube furnace or RTP for crystallization. Thin films having cubic phase NaxWO3 were fabricated by theoptimization of sputtering and post-annealing conditions, but single-phase cubic Na0.6WO3 thin films werenot obtained. Although the films were not in single phase, they had good electrical conduction propertiesshowing electrical resistivities of 10-4 Ω·cm order.
