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반도체 : 화학습식공정법을 이용한 용액 농도 및 시간에 따른ZnS 완충층 특성에 대한 분석

송경태, 김종완, 김민영, 신준철, 조성희, 임동건

Regular Paper : Semiconductor ; Properties of the ZnS Thin Film Buffer Layer by Chemical Bath Deposition Process with Different Solution Concentrations and Deposition Time

Kyeong Tae Son, Jong Wan Kim, Min Young Kim, Jun Chul Shin, Sung Hee Jo, Dong Gun Lim
J Electr Electron Mater 2014;27(5):269-275.
Published online: May 1, 2014
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본 연구는 화학습식공정법(CBD)을 이용하여 CdS의 단점을 극복한 ZnS (zinc sulfide)를 CIGS 박막 태양전지의 완충층으로 적용하기 위한 최적의 조건을 성립하고 적용하였다. 90℃의 공정온도에서 ITO glass를 사용하였으며, 티오요소의 농도는 고정하고 황산아연과 암모니아 수용액의 농도를 변화하며 ZnS 박막을 성장시켰다. 전기적, 구조적, 광학적 분석을 통해 황산아연과 암모니아 수용액의 농도 변화에 따른 ZnS 박막의 특성을 확인하였고, 황산아연 0.085 M, 암모니아 수용액 1.6 M에서 가장 성장 속도가 빠르고 균일한 ZnS 박막을 확인할 수 있었다.

In this study, chemical bath deposition method was used to grow Zinc sulfide(ZnS) thin filmsfrom NH3/SC(NH2)2/ZnSO4 solutions at 90℃. ZnS thin films have been prepared onto ITO glass. Theconcentrations of ZnSO4 and NH were varied while the concentration of Thiourea was fixed in 0.52 M. Structural, optical, electrical characteristic of ZnS thin films were measured. The physical and opticalproperties of different ZnS thin films were influenced severely by the concentration of the two reactingchemicals. The optimal concentration of ZnSO4 and NH3 was 0.085 M and 1.6 M, respectively.

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Regular Paper : Semiconductor ; Properties of the ZnS Thin Film Buffer Layer by Chemical Bath Deposition Process with Different Solution Concentrations and Deposition Time
J Electr Electron Mater. 2014;27(5):269-275.   Published online May 1, 2014
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Regular Paper : Semiconductor ; Properties of the ZnS Thin Film Buffer Layer by Chemical Bath Deposition Process with Different Solution Concentrations and Deposition Time
J Electr Electron Mater. 2014;27(5):269-275.   Published online May 1, 2014
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