Diameter controlled carbon nanotubes (CNTs) were grown using surface modified iron nano-particle catalysts with aminpropyltriethoxysilane (ASP). Iron nano-particles were synthesized by thermal decomposition of iron pentacarbonyl-oleic acid complex. Subsequently, APS modification was done using the iron nano-particles synthesized. Agglomeration of the iron nano-particles during the CNT growth process was dffectively prevented by the surface modification of nano-particles with the ASP. Plays as a linker material between Fe nano-particles and SiO₂ substrate resulting in blocking the migration of nano-particles. ASP also formed siliceous material covering iron nano-particles that prevented agglomeration of iron nano- particles at the early stages of the CNT growth. Therefore we could obtain the diameter controlled CNTs by blocking agglomeration of iron nano-particles.