초록

본 논문에서는 PLD와 RF 스퍼터링 방법을 이용하여 SAW filter용 ZnO 박막을 제작하였고 그 특성을 연구하였다. ZnO 박막은 PLD 방법으로 sapphire기판 위에 seed 층을 증착 후 스퍼터링 방법으로 재증착하였다. ZnO 박막의 구조적 특성과 표면특성을 분석하기 위해 XRD, SEM, AFM 등을 사용하였다. 최소 표면거칠기는 1.92nm이고, rocking curve는 0.92°로 측정되었다. ZnO 박막을 이용하여 대역폭이0.97㎒이고 중심주파수가 18.72㎒인 SAW filter를 제작하였다.

Abstract

We proposed the ZnO thin film for a SAW filter by PLD and RF sputtering method. ZnO thin films was pre-deposited on a sapphire substrate as a seed layer by PLD method and then deposited on seed layer by RF sputtering. The surface characteristics of ZnO thin film were investigated by XRD, SEM and AFM. The minimum surface roughness was 1.92 nm and FWHM of rocking curve was 0.92°. We demonstrated the SAW filter with bandwidth of approximately 0.97 ㎒ and the center frequency of 18.72 ㎒ using the proposed ZnO thin film.

• Keywords: SAW filter, PLD, RF magnetron sputter, ZnO