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다스플레이·광소자 : Al3+와 Y3+ 동시치환 SnO2 투명전극 박막의 전기적 특성

김근우, 서용준, 성창훈, 박근영, 조호제, 허시내, 구본혼

Display and Optical Devices : Electrical Properties of Al3+ and Y3+ Co-doped SnO2 Transparent Conducting Films

Geun Woo Kim, Yong Jun Seo, Chang Hoon Sung, Keun Young Park, Ho Je Cho, Si Nae Heo, Bon Heun Koo
J Electr Electron Mater 2012;25(10):805-810.
Published online: October 1, 2012
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Transparent conducting oxides (TCOs) have wide range of application areas in transparent electrode for display devices, Transparent coating for solar energy heat mirrors, and electromagnetic wave shield. SnO2 is intrinsically an n-type semiconductor due to oxygen deficiencies and has a high energy-band gap more than 3.5eV. It is known as a transparent conducting oxide because of its low resistivity of 10-3Ωcm and high transmittance over 90% in visible region. In this study, co-doping effects of Al and Y on the properties of SnO2 were investigated. The addition of Y in SnO2 was tried to create oxygen vacancies that increase the diffusivity of oxygen ions for the densification of SnO2. The addition of Al was expected to increase the electron concentration. Once, we observed solubility limit of SnO2 single-doped with Al and Y. {(x/2) Al2O3+(x/2) Y2O3}-SnO2 was used for the source of Al and Y to prevent the evaporation of Al2O3 and for the charge compensation. And we observed the valence changes of aluminium oxide because generally reported of valence changes of aluminium oxide in Tin - Aluminium binary system. The electrical properties, solubility limit, densification and microstructure of SnO2 co-doped with Al and Y will be discussed.

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Display and Optical Devices : Electrical Properties of Al3+ and Y3+ Co-doped SnO2 Transparent Conducting Films
J Electr Electron Mater. 2012;25(10):805-810.   Published online October 1, 2012
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Display and Optical Devices : Electrical Properties of Al3+ and Y3+ Co-doped SnO2 Transparent Conducting Films
J Electr Electron Mater. 2012;25(10):805-810.   Published online October 1, 2012
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