Modeling of PECVD Oxide Film Properties Using Neural Networks

Eun Jin Lee; Tae Seon Kim

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신경회로망을 이요한 PECVD 산화막의 특성 모형화

이은진, 김태선

Modeling of PECVD Oxide Film Properties Using Neural Networks

Eun Jin Lee, Tae Seon Kim

J Electr Electron Mater 2010;23(11):831-836.
Published online: November 1, 2010

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Keywords: PECVD, Oxide, film, Neural network, Modeling, Sensitivity analysis

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Modeling of PECVD Oxide Film Properties Using Neural Networks

J Electr Electron Mater. 2010;23(11):831-836. Published online November 1, 2010

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Modeling of PECVD Oxide Film Properties Using Neural Networks

J Electr Electron Mater. 2010;23(11):831-836. Published online November 1, 2010

Articles

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신경회로망을 이요한 PECVD 산화막의 특성 모형화

Modeling of PECVD Oxide Film Properties Using Neural Networks

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