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Holographic Lithography 방법을 적용한 Chalcogenide-based ReRAM(Resistance RAM) 소자의 개발에 관한 연구

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A Study on the Development of Chalcogenide-based ReRAM(Resistance RAM) Device with Holographic Lithography Method

Ki Hyun Nam, Hong Bay Chung
J Electr Electron Mater 2009;22(12):1014-1017.
Published online: December 1, 2009
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A Study on the Development of Chalcogenide-based ReRAM(Resistance RAM) Device with Holographic Lithography Method
J Electr Electron Mater. 2009;22(12):1014-1017.   Published online December 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
A Study on the Development of Chalcogenide-based ReRAM(Resistance RAM) Device with Holographic Lithography Method
J Electr Electron Mater. 2009;22(12):1014-1017.   Published online December 1, 2009
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