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RF 스퍼터링법에 의한 SBN 박막의 표면형상 및 유전특성

김진사, 김충혁

Surface Morphology and Dielectric Properties of SBN Thin Film by RF Sputtering Method

Jin Sa Kim, Chung Hyeok Kim
J Electr Electron Mater 2009;22(8):671-676.
Published online: August 1, 2009
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Surface Morphology and Dielectric Properties of SBN Thin Film by RF Sputtering Method
J Electr Electron Mater. 2009;22(8):671-676.   Published online August 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Surface Morphology and Dielectric Properties of SBN Thin Film by RF Sputtering Method
J Electr Electron Mater. 2009;22(8):671-676.   Published online August 1, 2009
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