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N-methylpyrrolidine Alane 전구체를 사용한 Al 필름 합성 및 특성 분석

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Synthesis and Characterization of Al Film using N-methylpyrrolidine Alane

Moon Kyu Seo
J Electr Electron Mater 2009;22(7):549-554.
Published online: July 1, 2009
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Synthesis and Characterization of Al Film using N-methylpyrrolidine Alane
J Electr Electron Mater. 2009;22(7):549-554.   Published online July 1, 2009
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Synthesis and Characterization of Al Film using N-methylpyrrolidine Alane
J Electr Electron Mater. 2009;22(7):549-554.   Published online July 1, 2009
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