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새로운 가이드 튜브를 통한 6H-SiC 단결정의 직경 확장에 관한 연구

손창현, 최정우, 이기섭, 황현희, 최종문, 구갑혈, 이원재, 신병철

The Diameter Expansion of 6H-SiC Single Crystals by the Modification of Inner Guide Tube

Chang Hyun Son, Jung Woo Choi, Gi Sub Lee, Hyun Hee Hwang, Jong Mun Choi, Kap Ryeol Ku, Won Jae Lee, Byoung Chul Shin
J Electr Electron Mater 2008;21(9):795-800.
Published online: September 1, 2008
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The Diameter Expansion of 6H-SiC Single Crystals by the Modification of Inner Guide Tube
J Electr Electron Mater. 2008;21(9):795-800.   Published online September 1, 2008
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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The Diameter Expansion of 6H-SiC Single Crystals by the Modification of Inner Guide Tube
J Electr Electron Mater. 2008;21(9):795-800.   Published online September 1, 2008
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