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Ge-MOSFETs을 위한 Ni-Co 합금을 이용한 Ni-germanide의 열안정성 개선

박기영, 정순연, 장잉잉, 한인식, 이세광, 종준, 신홍식, 김영철, 김재준, 이가원, 왕진석

Thermal Stability Improvement of Ni-germanide using Ni-Co alloy for Ge-MOSFETs Technology

Kee Young Park, Soon Yen Jung, Ying Ying Zhang, In Shik Han, Shi Guang Li, Zhun Zhong, Hong Sik Shin, Yeong Cheol Kim, Jae Jun Kim, Ga Won Lee, Jin Suk Wang
J Electr Electron Mater 2008;21(8):733-737.
Published online: August 1, 2008
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Thermal Stability Improvement of Ni-germanide using Ni-Co alloy for Ge-MOSFETs Technology
J Electr Electron Mater. 2008;21(8):733-737.   Published online August 1, 2008
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Thermal Stability Improvement of Ni-germanide using Ni-Co alloy for Ge-MOSFETs Technology
J Electr Electron Mater. 2008;21(8):733-737.   Published online August 1, 2008
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