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반도체 : 미세 표면 구조물을 갖는 패드의 제작 및 STI CMP 특성 연구

정석훈, 정재우, 박기현, 서헌덕, 박재홍, 박범영, 주석배, 최재영, 정해도

Development of Microstructure Pad and Its Performances in STI CMP

Suk Hoon Jeong, Jae Woo Jung, Ki Hyun Park, Heon Deok Seo, Jae Hong Park, Boum Young Park, Suk Bae Joo, Jae Young Choi, Hae Do Jeong
J Electr Electron Mater 2008;21(3):203-207.
Published online: March 1, 2008
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Development of Microstructure Pad and Its Performances in STI CMP
J Electr Electron Mater. 2008;21(3):203-207.   Published online March 1, 2008
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Development of Microstructure Pad and Its Performances in STI CMP
J Electr Electron Mater. 2008;21(3):203-207.   Published online March 1, 2008
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