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센서,기능성 박막 ; 플라즈마 ALD법에 의해 제조된 마이크로볼로미터용 바나듐 산화막의 제작 및 특성

윤형선, 정순원, 정상현, 김광호, 최창억, 유병곤

Fabrication and Properties of Vanadium Oxide Thin Films for Microbolometer by using Plasma Atomic Layer Deposition Method

Hyeong Seon Yun, Soon Won Jung, Sang Hyun Jeong, Kwang Ho Kim, Chang Auck Choi, Byoung Gon Yu
J Electr Electron Mater 2008;21(2):156-161.
Published online: February 1, 2008
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Fabrication and Properties of Vanadium Oxide Thin Films for Microbolometer by using Plasma Atomic Layer Deposition Method
J Electr Electron Mater. 2008;21(2):156-161.   Published online February 1, 2008
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Fabrication and Properties of Vanadium Oxide Thin Films for Microbolometer by using Plasma Atomic Layer Deposition Method
J Electr Electron Mater. 2008;21(2):156-161.   Published online February 1, 2008
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