A Study on Cleaning Process of RIE Damaged Silicon

Eun Gu Lee; Jae Gab Lee; Jae Jeong Kim

Articles

Page Path

반응성 이온 식각에 의해 손상된 실리콘의 세정에 관한 연구

이은구, 이재갑, 김재정

A Study on Cleaning Process of RIE Damaged Silicon

Eun Gu Lee, Jae Gab Lee, Jae Jeong Kim

J Electr Electron Mater 1994;7(4):294-298.

5 Views
0 Download
0 Crossref
0 Scopus

prev next

Full Article

Download PDF

Cite

CITE

export

Copy Download

Format

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
BibTeX — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

A Study on Cleaning Process of RIE Damaged Silicon

J Electr Electron Mater. 1994;7(4):294-298.

Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:

RIS — For EndNote, ProCite, RefWorks, and most other reference management software
bib — For JabRef, BibDesk, and other BibTeX-specific software

Include:

Citation for the content below
Citation and abstract for the content below

A Study on Cleaning Process of RIE Damaged Silicon

J Electr Electron Mater. 1994;7(4):294-298.

Articles

Page Path

반응성 이온 식각에 의해 손상된 실리콘의 세정에 관한 연구

A Study on Cleaning Process of RIE Damaged Silicon

Full Article

CITE

Download Citation

Format:

Include:

Related articles

ABOUT

BROWSE ARTICLES

EDITORIAL POLICIES

FOR CONTRIBUTORS