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CFUBM Sputtering법으로 증착시킨 티타늄이 첨가된 비정질 탄소 박막의 기계적 특성 연구

조형준, 박용섭, 김형진, 최원석, 홍병유

Mechanical Properties of Ti doped Amorphous Carbon Films prepared by CFUBM Sputtering Method

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J Electr Electron Mater 2007;20(8):706-710.
Published online: August 1, 2007
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Mechanical Properties of Ti doped Amorphous Carbon Films prepared by CFUBM Sputtering Method
J Electr Electron Mater. 2007;20(8):706-710.   Published online August 1, 2007
Download Citation

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Mechanical Properties of Ti doped Amorphous Carbon Films prepared by CFUBM Sputtering Method
J Electr Electron Mater. 2007;20(8):706-710.   Published online August 1, 2007
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