Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion

Won Ju Cho; Hyun Mo Koo; Woo Hyun Lee; Sang Mo Koo; Hong Bay Chung

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Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion

Won Ju Cho, Hyun Mo Koo, Woo Hyun Lee, Sang Mo Koo, Hong Bay Chung

J Electr Electron Mater 2007;20(5):394-398.
Published online: May 1, 2007

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Keywords: Solid phase diffusion, Ultra-shallow junction, Nano-scale, FinFET, As-doped spin on-glass

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Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion

J Electr Electron Mater. 2007;20(5):394-398. Published online May 1, 2007

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion

J Electr Electron Mater. 2007;20(5):394-398. Published online May 1, 2007

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Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion

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