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10nm 두께의 니켈 코발트 합금 박막으로부터 제조된 니켈코발트 복합실리사이드의 미세구조 분석

송오성, 김상엽, 김종률

Microstructure Characterization for Nano-thick Nickel Cobalt Composite Suicides from 10 nm-Ni(0.5)Co(0.5) Alloy Films

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J Electr Electron Mater 2007;20(4):308-317.
Published online: April 1, 2007
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Microstructure Characterization for Nano-thick Nickel Cobalt Composite Suicides from 10 nm-Ni(0.5)Co(0.5) Alloy Films
J Electr Electron Mater. 2007;20(4):308-317.   Published online April 1, 2007
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Microstructure Characterization for Nano-thick Nickel Cobalt Composite Suicides from 10 nm-Ni(0.5)Co(0.5) Alloy Films
J Electr Electron Mater. 2007;20(4):308-317.   Published online April 1, 2007
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