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Al2O3 절연방막의 형성과 그 활용방안에 관한 연구

김종열, 정종척, 박용희, 성만영

A Study on the Growth of Al2O3 Insulation Films and Its Application

Jong Ryeul Kim, Jong Chuck Jung, Yong Hee Park, Man Young Sung
J Electr Electron Mater 1994;7(1):57-62.
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A Study on the Growth of Al2O3 Insulation Films and Its Application
J Electr Electron Mater. 1994;7(1):57-62.
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A Study on the Growth of Al2O3 Insulation Films and Its Application
J Electr Electron Mater. 1994;7(1):57-62.
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