Properly Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2

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ZrO2와 SiO2 절연막에 따른 Ru-Zr 금속 게이트 전극의 특성 비교

서현상, 이정민, 손기민, 홍신남, 이인규, 송요승

Properly Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2

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J Electr Electron Mater 2006;19(9):808-812.
Published online: September 1, 2006

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Keywords: Gate electrode, High-k, Ru, Zr, ZrO2

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Properly Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2

J Electr Electron Mater. 2006;19(9):808-812. Published online September 1, 2006

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Properly Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2

J Electr Electron Mater. 2006;19(9):808-812. Published online September 1, 2006

Articles

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ZrO2와 SiO2 절연막에 따른 Ru-Zr 금속 게이트 전극의 특성 비교

Properly Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2

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