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Undoped ZnO 박막에 Ampoule-tube 방법을 이용한 P와 As의 확산과 p형 ZnO 박막의 전기적 특성

소순진, 왕민성, 박춘배

Phosphorus and Arsenic Diffusion used by Ampoule-tube Method into Undoped ZnO Thin Films and the Electrical Properties of p-type ZnO Thin Films

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J Electr Electron Mater 2005;18(11):1043-1047.
Published online: November 1, 2005
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Phosphorus and Arsenic Diffusion used by Ampoule-tube Method into Undoped ZnO Thin Films and the Electrical Properties of p-type ZnO Thin Films
J Electr Electron Mater. 2005;18(11):1043-1047.   Published online November 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
Format:
Include:
Phosphorus and Arsenic Diffusion used by Ampoule-tube Method into Undoped ZnO Thin Films and the Electrical Properties of p-type ZnO Thin Films
J Electr Electron Mater. 2005;18(11):1043-1047.   Published online November 1, 2005
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