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산소 플라즈마 처리후의 이차전자방출계수(γ)를 이용한 MgO 보호막의 일함수(Фw) 변화

정재천, 유세기, 조재원

Work Function Changes on MgO Protective Layer after O2-plasma Treatment from Ion-induced Secondary Electron Emission Coefficient

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J Electr Electron Mater 2005;18(3):259-263.
Published online: March 1, 2005
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Work Function Changes on MgO Protective Layer after O2-plasma Treatment from Ion-induced Secondary Electron Emission Coefficient
J Electr Electron Mater. 2005;18(3):259-263.   Published online March 1, 2005
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Work Function Changes on MgO Protective Layer after O2-plasma Treatment from Ion-induced Secondary Electron Emission Coefficient
J Electr Electron Mater. 2005;18(3):259-263.   Published online March 1, 2005
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