SAXS and AFM Study on Porous Silicon Prepared by Anodic Etching in HF-based Solution

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SAXS와 AFM에 의한 HF-용액내 양극 에칭에 의해 제조된 기공성 실리콘의 구조연구

김유진, 김화중

SAXS and AFM Study on Porous Silicon Prepared by Anodic Etching in HF-based Solution

J Electr Electron Mater 2004;17(11):1218-1223.
Published online: November 1, 2004

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Keywords: Porous silicon, Small angle x-ray scattering, Atomic force microscopy

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SAXS and AFM Study on Porous Silicon Prepared by Anodic Etching in HF-based Solution

J Electr Electron Mater. 2004;17(11):1218-1223. Published online November 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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SAXS and AFM Study on Porous Silicon Prepared by Anodic Etching in HF-based Solution

J Electr Electron Mater. 2004;17(11):1218-1223. Published online November 1, 2004

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SAXS와 AFM에 의한 HF-용액내 양극 에칭에 의해 제조된 기공성 실리콘의 구조연구

SAXS and AFM Study on Porous Silicon Prepared by Anodic Etching in HF-based Solution

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