Repairing of a Defective Metallic Line using Laser CVD Deposited Tungsten Film in TFT LCD

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레이저 CVD 텅스텐막 증착을 통한 TFT LCD 불량배선 수리

김석군, 손정석, 이기선

Repairing of a Defective Metallic Line using Laser CVD Deposited Tungsten Film in TFT LCD

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J Electr Electron Mater 2004;17(10):1114-1119.
Published online: October 1, 2004

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Keywords: Laser induced CVD, TFT LCD, Laser photodepostion, Laser repair, Photodissociation

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Repairing of a Defective Metallic Line using Laser CVD Deposited Tungsten Film in TFT LCD

J Electr Electron Mater. 2004;17(10):1114-1119. Published online October 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Repairing of a Defective Metallic Line using Laser CVD Deposited Tungsten Film in TFT LCD

J Electr Electron Mater. 2004;17(10):1114-1119. Published online October 1, 2004

Articles

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레이저 CVD 텅스텐막 증착을 통한 TFT LCD 불량배선 수리

Repairing of a Defective Metallic Line using Laser CVD Deposited Tungsten Film in TFT LCD

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