Characteristics of Friction Affecting CMP Results

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CMP 결과에 영향을 미치는 마찰 특성에 관한 연구

박범영, 이현섭, 김형재, 서헌덕, 김구연, 정해도

Characteristics of Friction Affecting CMP Results

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J Electr Electron Mater 2004;17(10):1041-1048.
Published online: October 1, 2004

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Keywords: Chemical mechanical polishing, Friction force, Wear, Lubrication, Coefficient of friction, Material removal, Uniformity

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Characteristics of Friction Affecting CMP Results

J Electr Electron Mater. 2004;17(10):1041-1048. Published online October 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Characteristics of Friction Affecting CMP Results

J Electr Electron Mater. 2004;17(10):1041-1048. Published online October 1, 2004

Articles

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CMP 결과에 영향을 미치는 마찰 특성에 관한 연구

Characteristics of Friction Affecting CMP Results

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