A Study on the Formation of Trench Gate for High Power DMOSFET Applications

Hoon Soo Park; Jin Gun Koo; Young Ki Lee

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고 전력 DMOSFET 응용을 위한 트렌치 게이트 형성에 관한 연구

박훈수, 구진근, 이영기

A Study on the Formation of Trench Gate for High Power DMOSFET Applications

Hoon Soo Park, Jin Gun Koo, Young Ki Lee

J Electr Electron Mater 2004;17(7):713-717.
Published online: July 1, 2004

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Keywords: Trench gate, DMOSFET, On-resistance

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A Study on the Formation of Trench Gate for High Power DMOSFET Applications

J Electr Electron Mater. 2004;17(7):713-717. Published online July 1, 2004

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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A Study on the Formation of Trench Gate for High Power DMOSFET Applications

J Electr Electron Mater. 2004;17(7):713-717. Published online July 1, 2004

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고 전력 DMOSFET 응용을 위한 트렌치 게이트 형성에 관한 연구

A Study on the Formation of Trench Gate for High Power DMOSFET Applications

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