Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

Yu Li Kang; Yong Gug Kim; Su Won Kim; Byeong Gwon Ju

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Flexible 마이크로시스템을 위한 압전 박막 공진기의 설계 및 제작

강유리, 김용국, 김수원, 주병권

Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

Yu Li Kang, Yong Gug Kim, Su Won Kim, Byeong Gwon Ju

J Electr Electron Mater 2003;16(12s):1224-1231.

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Keywords: FBAR, Flexible microsystems, Thin wafer

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Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

J Electr Electron Mater. 2003;16(12s):1224-1231.

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

J Electr Electron Mater. 2003;16(12s):1224-1231.

Articles

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Flexible 마이크로시스템을 위한 압전 박막 공진기의 설계 및 제작

Design and Fabrication of Film Bulk Acoustic Resonator for Flexible Microsystems

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