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광소자 : 2차원 광결정 제작에 패턴 특성을 향상시키지 위한 공정 기술

김해성, 심동훈, 김순구, 이진구, 이범석, 김혜원, 이재은, 한영수, 최영호

Optical Devices : Fabrication Technology for Improving Pattern Quality in Two-Dimensional Photonic Crystal Structure

Hae Sung Kim, Dong Hoon Shin, Soon Koo Kim, Jin Koo Rhee, Beom Seok Lee, Hye Won Kim, Jae Un Lee, Young Soo Han, Young Ho Choe
J Electr Electron Mater 2003;16(6):515-521.
Published online: June 1, 2003
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Optical Devices : Fabrication Technology for Improving Pattern Quality in Two-Dimensional Photonic Crystal Structure
J Electr Electron Mater. 2003;16(6):515-521.   Published online June 1, 2003
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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Optical Devices : Fabrication Technology for Improving Pattern Quality in Two-Dimensional Photonic Crystal Structure
J Electr Electron Mater. 2003;16(6):515-521.   Published online June 1, 2003
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