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유도결합 CF4/Ar 플라즈마에 의한 Bi4-xLaxTi3O12 박막의 식각 표면 반응

김동표, 김경태, 김창일

Surface Reactions on the Bi4-xLaxTi3O12 Thin Films Etched in Inductively Coupled CF4/Ar Plasma

Dong Pyo Kim, Kyoung Tae Kim, Chang II Kim
J Electr Electron Mater 2003;16(5):378-384.
Published online: May 1, 2003
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Surface Reactions on the Bi4-xLaxTi3O12 Thin Films Etched in Inductively Coupled CF4/Ar Plasma
J Electr Electron Mater. 2003;16(5):378-384.   Published online May 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Surface Reactions on the Bi4-xLaxTi3O12 Thin Films Etched in Inductively Coupled CF4/Ar Plasma
J Electr Electron Mater. 2003;16(5):378-384.   Published online May 1, 2003
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