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MEMS 공정 제작방법에 의한 솔레노이드형 여자 코일과 검출코일을 사용한 마이크로 플럭스게이트 센서

나경원, 박해석, 심동식, 최원열, 황준식, 최상언

MEMS-based Micro Fluxgate Sensor Using Solenoid Excitation and Pick-up Coils

Kyoung Won Na, Hae Seok Park, Dong Sik Shim, Won Youl Choi, Jun Sik Hwang, Sang On Choi
J Electr Electron Mater 2003;16(2):120-124.
Published online: February 1, 2003
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MEMS-based Micro Fluxgate Sensor Using Solenoid Excitation and Pick-up Coils
J Electr Electron Mater. 2003;16(2):120-124.   Published online February 1, 2003
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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MEMS-based Micro Fluxgate Sensor Using Solenoid Excitation and Pick-up Coils
J Electr Electron Mater. 2003;16(2):120-124.   Published online February 1, 2003
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