Physical Characteristics of 3C-SiC Thin-films Grown on Si(100) Water

Gwiy Sang Chung; Yun Sik Chung; Shigehiro Nishino

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Si(100) 기관 위에 성장된 3C-SiC 박막의 물리적 특성

정귀상, 정연식, 정연식

Physical Characteristics of 3C-SiC Thin-films Grown on Si(100) Water

Gwiy Sang Chung, Yun Sik Chung, Shigehiro Nishino

J Electr Electron Mater 2002;15(11):953-957.
Published online: November 1, 2002

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Physical Characteristics of 3C-SiC Thin-films Grown on Si(100) Water

J Electr Electron Mater. 2002;15(11):953-957. Published online November 1, 2002

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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Physical Characteristics of 3C-SiC Thin-films Grown on Si(100) Water

J Electr Electron Mater. 2002;15(11):953-957. Published online November 1, 2002

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Si(100) 기관 위에 성장된 3C-SiC 박막의 물리적 특성

Physical Characteristics of 3C-SiC Thin-films Grown on Si(100) Water

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