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센서 기능성박막 : 수직형 Feed - through 갖는 RF - MEMS 소자의 웨이퍼 레벨 패키징

박윤권, 이덕중, 박흥우, 이윤희, 김철주, 주병권, 김훈

Sensor Thin Film : Wafer Level Packaging of RF - MEMS Devices with Vertical Feed - through

Yun Kwon Park, Duck Jung Lee, Heung Woo Park, Yun Hi Lee, Chul Ju Kim, Byeong Kwon Ju, Hoon Kim
J Electr Electron Mater 2002;15(10):889-895.
Published online: October 1, 2002
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Sensor Thin Film : Wafer Level Packaging of RF - MEMS Devices with Vertical Feed - through
J Electr Electron Mater. 2002;15(10):889-895.   Published online October 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Sensor Thin Film : Wafer Level Packaging of RF - MEMS Devices with Vertical Feed - through
J Electr Electron Mater. 2002;15(10):889-895.   Published online October 1, 2002
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