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Ru / RuO2 전극에 성장한 PZT 박막의 특성에 관한 연구

강현일, 최장현, 박영, 송준태

Properties of PZT Thin Film on the Ru / RuO2 Electrode

Hyun Il Kang, Jang Hyun Choi, Young Park, Joon Tae Song
J Electr Electron Mater 2002;15(10):865-869.
Published online: October 1, 2002
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Properties of PZT Thin Film on the Ru / RuO2 Electrode
J Electr Electron Mater. 2002;15(10):865-869.   Published online October 1, 2002
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Properties of PZT Thin Film on the Ru / RuO2 Electrode
J Electr Electron Mater. 2002;15(10):865-869.   Published online October 1, 2002
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