Tapered Etching of Field Oxide with Various Angle using TEOS

Sang Gi Kim; Il Yong Park; Jin Gun Koo; Jong Dae Kim

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다양한 기울기를 갖는 TEOS 필드 산화막의 경사식각

김상기, 박일용, 구진근, 김종대

Tapered Etching of Field Oxide with Various Angle using TEOS

Sang Gi Kim, Il Yong Park, Jin Gun Koo, Jong Dae Kim

J Electr Electron Mater 2002;15(10):844-850.
Published online: October 1, 2002

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Tapered Etching of Field Oxide with Various Angle using TEOS

J Electr Electron Mater. 2002;15(10):844-850. Published online October 1, 2002

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Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

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bib — For JabRef, BibDesk, and other BibTeX-specific software

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Citation for the content below
Citation and abstract for the content below

Tapered Etching of Field Oxide with Various Angle using TEOS

J Electr Electron Mater. 2002;15(10):844-850. Published online October 1, 2002

Articles

Page Path

다양한 기울기를 갖는 TEOS 필드 산화막의 경사식각

Tapered Etching of Field Oxide with Various Angle using TEOS

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