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센서 기능성 박막 : RF 마그네트론 스퍼터링에 의한 SAW 필터용 ZnO 압전 박막에 관한 연구

최형욱, 김경환, 김상종, 강종윤, 안병국, 윤석진

Sensor , Thin Film : A Study on the ZnO Piezoelectric Thin Films for SAW Filter by RF Magnetron Sputtering

Hyung Wook Choi, Kyung Hwan Kim, Sang Jong Kim, Chong Yun Chang, Byung Guk Ahn, Seok Jin Yoon
J Electr Electron Mater 2002;15(9):798-807.
Published online: September 1, 2002
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Sensor , Thin Film : A Study on the ZnO Piezoelectric Thin Films for SAW Filter by RF Magnetron Sputtering
J Electr Electron Mater. 2002;15(9):798-807.   Published online September 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Sensor , Thin Film : A Study on the ZnO Piezoelectric Thin Films for SAW Filter by RF Magnetron Sputtering
J Electr Electron Mater. 2002;15(9):798-807.   Published online September 1, 2002
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