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다결정 실리콘의 미세구조와 전기적 특성에 관한 연구

이은구, 문대규, 정호영

A Study on Microstructure and Electrical Properties of LPCVD Polysilicon

Eun Gu Lee, Dae Gyu Moon, Ho Young Jeong
J Electr Electron Mater 1992;5(3):310-318.
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A Study on Microstructure and Electrical Properties of LPCVD Polysilicon
J Electr Electron Mater. 1992;5(3):310-318.
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A Study on Microstructure and Electrical Properties of LPCVD Polysilicon
J Electr Electron Mater. 1992;5(3):310-318.
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