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선형가열기를 이용한 Si∥SiO2/Si3N4∥Si 이종기판쌍의 직접접합

이상현, 이상돈, 송오성

Direct Bonding of Si∥SiO2/Si3N4∥Si Wafer Pairs with a Fast Linear Annealing

Sang Hyun Lee, Sang Don Yi, Oh Sung Song
J Electr Electron Mater 2002;15(4):301-307.
Published online: April 1, 2002
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Direct Bonding of Si∥SiO2/Si3N4∥Si Wafer Pairs with a Fast Linear Annealing
J Electr Electron Mater. 2002;15(4):301-307.   Published online April 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.
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Direct Bonding of Si∥SiO2/Si3N4∥Si Wafer Pairs with a Fast Linear Annealing
J Electr Electron Mater. 2002;15(4):301-307.   Published online April 1, 2002
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