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쌍극 폴리 - 금속 게이트를 적용한 CMOS 트랜지스터의 특성

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Characteristics of CMOS Transistor using Dual Poly - metal ( W / WNx / Poly - Si ) Gate Electrode

Sung Keun Cheng
J Electr Electron Mater 2002;15(3):233-237.
Published online: March 1, 2002
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Characteristics of CMOS Transistor using Dual Poly - metal ( W / WNx / Poly - Si ) Gate Electrode
J Electr Electron Mater. 2002;15(3):233-237.   Published online March 1, 2002
Download Citation

Download a citation file in RIS format that can be imported by all major citation management software, including EndNote, ProCite, RefWorks, and Reference Manager.

Format:
Include:
Characteristics of CMOS Transistor using Dual Poly - metal ( W / WNx / Poly - Si ) Gate Electrode
J Electr Electron Mater. 2002;15(3):233-237.   Published online March 1, 2002
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